Code 8414 10

VACUUM PUMPS

SECTION XVI. Machinery and mechanical appliances; electrical equipment; parts thereof; sound recorders and reproducers, television image and sound recorders and reproducers, and parts and accessories of such articles

84 NUCLEAR REACTORS, BOILERS, MACHINERY AND MECHANICAL APPLIANCES; PARTS THEREOF

8414 Air or vacuum pumps, air or other gas compressors and fans; ventilating or recycling hoods incorporating a fan, whether or not fitted with filter:

8414 10 vacuum pumps:

8414 10 200 0 for use in semiconductor production

other:

8414 10 250 0 rotary piston pumps, sliding vane rotary pumps, molecular drag (vacuum) pumps and Roots vacuum pumps

other:

8414 10 810 0 diffusion pumps, cryopumps and adsorption pumps

8414 10 890 0 other